All-stable-point out ultraviolet lasers are greatly Utilized in the fields of mechanical flaw detection, lithography, micromachining and medicine for the advantages of tiny volume, long life, high performance, very good beam good quality, large tuning and slim spectral line, and so forth. Utilizing significant electricity in close proximity to-infrared coherent mild resource as the basic frequency resource based upon nonlinear tuning technological know-how, producing ultraviolet coherent radiation by multistage frequency conversion is viewed as a crucial method to build the ultraviolet coherent light-weight resource.
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We summarized The present improvement position with the large-energy DUV laser each within the wavelength of FHG in the one-μm laser and at 193 nm. The current improvement of your reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts not simply the typical energy and also the beam quality (coherence) in the DUV lasers to an unprecedented amount.
The average electricity of your NIR laser continue to has the probable to get enhanced to tens of watts for example 70 W [26] When the double-pass configuration could possibly be used with the Yb:YAG SCF amplifier stage. Consequently, In the event the conversion efficiency of 31% from NIR to DUV may be even now maintained at this increased ability issue, the standard output power from the DUV laser at 258 nm might be over 20 W, which might be a extraordinary electricity degree for your DUV laser and lead to the unanticipated DUV laser machining results. What's more, for prime-energy DUV laser, the UV destruction on the nonlinear crystal, including the Home windows for CLBO crystal plus the mirrors, is another vital parameter for long run and steady operation.
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On another side, the power scaling of the NIR laser is yet another factor to improve the average power in the 193-nm DUV laser. As a result of lack of the significant-electric power amplification Option of the NIR laser (for instance at 1553 nm), nonlinear frequency procedures for instance optical parameter oscillation (OPO) may be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength along with obtaining relative larger energy [21]. Recently, a diamond Raman laser confirmed its capacity in achieving a significant power and also a high conversion effectiveness in the 1st Stokes from the 1-μm laser [22,23], which suggests the likelihood being applied while in the 193-nm DUV laser website era on account of its large Raman obtain and large frequency shift.
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In addition, combining the good-state laser with other nonlinear course of action including stimulated Raman scattering, NIR lasers can be achieved at new wavelengths with large ability and higher beam good quality, which was examined via the evidence-of-theory experiment. This Raman laser scheme presents a different path to the significant-electrical power DUV laser, In particular in the wavelength of 193 nm.
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The conversion efficiency from elementary NIR to DUV is from five% to 36% based on the reported ends in Desk 1. Raising the conversion efficiency will decrease the stress on the design and setup of the elemental laser amplifier in addition to the electric powered energy intake. A superb beam quality of the basic laser can even add to the escalating on the conversion performance and the appropriate energy intensity from the NIR and eco-friendly laser inside the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to inexperienced and inexperienced to DUV laser by use of CLBO crystal are 70% and about fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from fundamental to DUV.
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